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发明名称
MANUFACTURE OF SEMICONDUCTOR
摘要
申请公布号
JPS5544765(A)
申请公布日期
1980.03.29
申请号
JP19780118234
申请日期
1978.09.25
申请人
KYUSHU NIPPON ELECTRIC
发明人
IMAMURA TOORU
分类号
H01L21/3063;H01L21/302
主分类号
H01L21/3063
代理机构
代理人
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地址
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