| 摘要 |
PURPOSE:To obtain practical insulation resistance and to reduce the capacitance between electrodes, even with very thin piezoelectric thin film of constant elastic metal oscillator. CONSTITUTION:The thin film 2 of insulation is attached to the constant elastic material 1a such as elinver, next the piezoelectric thin film 1b such as ZnO is attached, and the electrode 1c is attached. As the insulation thin film, SiO, SiO2, Al2O3 etc., is used. By only adopting the thickness having sufficient insulation resistance and capacitance between electrodes, even if the piezoelectric thin film such as ZnO is made very thin, excellent performance is obtained and the increase in the working ability can be achieved. |
