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发明名称
WIREEBONDING APPARATUS
摘要
申请公布号
JPS5541755(A)
申请公布日期
1980.03.24
申请号
JP19780115290
申请日期
1978.09.20
申请人
TOKYO SHIBAURA ELECTRIC CO
发明人
KACHI KAZUO
分类号
H01L21/60
主分类号
H01L21/60
代理机构
代理人
主权项
地址
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