发明名称 X-RAY ANALYZING DEVICE OF ELECTRON MICROSCOPE
摘要 PURPOSE:To increase the X-ray sensing amount without enlarging a thermal conductive rod by forming an X-ray passage window in that part of cylinder periphery which mates with a specimen, and fitting an X-ray sensing element to the thermal conductive rod so that the X-ray incident through the window can be sensed. CONSTITUTION:A thermal conductive rod 6 is mounted on a shaft L1, which intersects approx. perpendicularly to the optical axis Z and is apart a distance lfrom the optical axis Z. A cylinder 9 is formed with bottom and that portion on its periphery which faces a specimen 4 is provided with an X-ray passage window 11 with a film affixed. A notch 12 is provided at that peripheral part of thermal conductive rod 6 which faces this window, and an X-ray sensing element is fixed in the axial direction. This allows enlarging the surface area of the light receiving surface of X-ray sensing element without requiring enlargement of the cylinder to lead to enhancement of the sensitivity without causing great size of the construction.
申请公布号 JPH01255143(A) 申请公布日期 1989.10.12
申请号 JP19880081009 申请日期 1988.04.01
申请人 JEOL LTD 发明人 TAIRA MASAYUKI;WATANABE EIICHI
分类号 G01N23/225;H01J37/244;H01J37/252 主分类号 G01N23/225
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