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发明名称
SEMICONDUCTOR DEVICE AND ITS MANUFACTURING METHOD
摘要
申请公布号
JPS5526681(A)
申请公布日期
1980.02.26
申请号
JP19780100234
申请日期
1978.08.16
申请人
MITSUBISHI ELECTRIC CORP
发明人
UEHARA MAKOTO
分类号
H01L29/43;H01L21/28
主分类号
H01L29/43
代理机构
代理人
主权项
地址
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