HEAT TREATMENT METHOD OF COMPOUND SEMICONDUCTOR AND ITS HEAT TREATMENT UNIT,申请号JP19780071706-传众专利搜索

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发明名称	HEAT TREATMENT METHOD OF COMPOUND SEMICONDUCTOR AND ITS HEAT TREATMENT UNIT
摘要
申请公布号	JPS54162451(A)	申请公布日期	1979.12.24
申请号	JP19780071706	申请日期	1978.06.13
申请人	MATSUSHITA ELECTRIC IND CO LTD	发明人	SUGAWA TOSHIO;KONUMA TAKESHI
分类号	H01L21/265;H01L21/324	主分类号	H01L21/265
代理机构		代理人
主权项
地址

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