APPARATUS FOR DEPOSITING LAYERS FROM A GAS PHASE,申请号SU19752115033-传众专利搜索

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发明名称	APPARATUS FOR DEPOSITING LAYERS FROM A GAS PHASE
摘要
申请公布号	SU701691(A1)	申请公布日期	1979.12.05
申请号	SU19752115033	申请日期	1975.03.19
申请人	IVANOV VADIM ,SU;BLINOV IVAN G,SU;SIGNALOV EDUARD B,SU;OVECHKIN ANATOLIJ A,SU	发明人	IVANOV VADIM ,SU;BLINOV IVAN G,SU;SIGNALOV EDUARD B,SU;OVECHKIN ANATOLIJ A,SU
分类号	(IPC1-7):B01J17/32	主分类号	(IPC1-7):B01J17/32
代理机构		代理人
主权项
地址

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