Powder material coating apparatus - with vibrator attached to material container below vacuum deposition source

摘要

Material in the form of granules or a powder is coated with another substance, esp. Al2O3 powder is coated with Ta, in a vacuum chamber where the material in an open container is kept in motion by a vibrator. The coating substance is deposited on the surface of the material particles by a source such as an electron beam deposition or vapour deposition.