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经营范围
发明名称
CARRIER DENSITY MEASURING APPARATUS
摘要
申请公布号
JPS54141700(A)
申请公布日期
1979.11.05
申请号
JP19780050347
申请日期
1978.04.26
申请人
MITSUBISHI ELECTRIC CORP
发明人
NAKATANI MASAAKI;MITSUI YASUROU;WATASE MANABU;KOBIKI MICHIHIRO
分类号
G01N27/22;H01L21/66
主分类号
G01N27/22
代理机构
代理人
主权项
地址
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