MASK FOR SOFT XXRAY LITHOGRAPH,申请号JP19780048717-传众专利搜索

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发明名称	MASK FOR SOFT XXRAY LITHOGRAPH
摘要
申请公布号	JPS54141571(A)	申请公布日期	1979.11.02
申请号	JP19780048717	申请日期	1978.04.26
申请人	DAINIPPON PRINTING CO LTD	发明人	KISHI NOBUYUKI;KANEKI AKIRA;TSUKUI NORIHIKO
分类号	H01L21/027;H01L21/302	主分类号	H01L21/027
代理机构		代理人
主权项
地址

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