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发明名称
VACUUM DEPOSITION APPARATUS
摘要
申请公布号
JPS54141392(A)
申请公布日期
1979.11.02
申请号
JP19780048704
申请日期
1978.04.26
申请人
ULVAC CORP
发明人
TSUCHIYA KOUYOU;INOUE YOUJI
分类号
C23C14/24;C23C14/50;H01L21/203;H01L21/365
主分类号
C23C14/24
代理机构
代理人
主权项
地址
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