| 摘要 |
The present invention relates to a method of manufacturing a high-density and high-purity tungsten target by recycling a spent tungsten target. More specifically, the present invention relates to a method of manufacturing a recycled tungsten target, comprising: (a) a step of removing backing plate from the spent tungsten target; (b) a step of removing impurities on a surface of the spent tungsten target; (c) a step of obtaining high-purity tungsten powder having the same components with the spent target; (d) a step of sintering firstly the spent target and the high-purity tungsten powder using a hot pressing (HP) method; (e) a step of performing a thermal treatment on the sintered body under a reduced-pressure or vacuum conditions; and (f) a step of manufacturing a high-density sintering body by sintering the sintered body secondarily using a hot-isostatic pressing method, and the recycled tungsten target regenerated thereof. The present invention is able to provide the recycled tungsten target having similar properties with a novel target even though the spent target is reused since the grain of the tungsten target is refined; and the tungsten target has high-purity, high-density, and a gas content thereof also controlled. |
