| 摘要 |
<p>The thin-film magnetic field sensor has a substrate carrying two conductor layers (L1, L2) defining the turns of a flat measuring coil. These are separated by two insulating layers (D1, D2), between which a magnetic layer (M) is sandwiched. The magnetic layer has an easy magnetisation direction parallel to the coil axis and to an external magnetic field. The magnetic layer (M) pref. comprises a series of magnetic layers separated by insulating layers, e. g. the magnetic layers having a thickness of 0.8 micrometres and the insulating layers a thickness of 0.3 micrometres.</p> |
