METHOD AND DEVICE FOR CORRECTING ABERRATION AT DEFLECTION IN PARTICLE RAY APPARATUS,申请号JP19790006235-传众专利搜索

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发明名称	METHOD AND DEVICE FOR CORRECTING ABERRATION AT DEFLECTION IN PARTICLE RAY APPARATUS
摘要
申请公布号	JPS54129298(A)	申请公布日期	1979.10.06
申请号	JP19790006235	申请日期	1979.01.24
申请人	ZEISS JENA VEB CARL	发明人	EBERUHARUTO HAAN
分类号	H01J37/153;B23K15/00;G21K1/08;G21K1/093;H01L21/027;H05H7/00	主分类号	H01J37/153
代理机构		代理人
主权项
地址

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