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发明名称
MANUFACTURE FOR SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS54109377(A)
申请公布日期
1979.08.27
申请号
JP19780016258
申请日期
1978.02.15
申请人
FUJITSU LTD
发明人
TATSUTA SHIGERU;SAKURAI TERUO
分类号
H01L21/76;H01L21/265
主分类号
H01L21/76
代理机构
代理人
主权项
地址
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