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经营范围
发明名称
Procédé pour réaliser des couches d'oxyde, planes et très pures, sur des monocristaux de silicium
摘要
申请公布号
FR1450842(A)
申请公布日期
1966.06.24
申请号
FR19650025092
申请日期
1965.07.19
申请人
SIEMENS & HALSKE AKTIENGESELLSCHAFT
发明人
分类号
H01L21/00;H01L21/3065;H01L21/316
主分类号
H01L21/00
代理机构
代理人
主权项
地址
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