| 摘要 |
PURPOSE:To narrow the exposure area of resin layers for bonding and reduce abrasion and surface roughening by providing non-magnetic layers having abrasion resistance equal to or better than that of magnetic thin films between said films. CONSTITUTION:First and seond non-magnetic insulation layers 22, 23 are provided on a magnetic substrate 21 such as of ferrite. Next, a magnetic material such as of Fe-Ni alloy is deposited by a vapor deposition process or the like and a magnetic thin film layer 24 of specified patterns is formed by a photoetching process. Photo resist layer 29 exists on the layer 24 and in this state, non-magnetic insulation layers 25, 25' are formed thereon at the same thickness as that of the layer 24. Next, the layer 29 is removed and the layer 25' thereon is also removed to provide the construction wherein the third non-magnetic insulation layer 25 interposes between the layers 24. A further fourth non-magnetic insulation layer is formed on the layers 24, 25 and the substrate is bonded by way of a resin layer to a holding plate such as glass. |
