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发明名称
IMPURITY DIFFUSION METHOD OF SEMICONDUCTOR SINGLE CRYSTAL
摘要
申请公布号
JPS54103670(A)
申请公布日期
1979.08.15
申请号
JP19780009362
申请日期
1978.02.01
申请人
NIPPON TELEGRAPH & TELEPHONE
发明人
KOBAYASHI TAKESHI;TAKANASHI YOSHIFUMI;TAKAHASHI SHINICHI
分类号
H01L21/22
主分类号
H01L21/22
代理机构
代理人
主权项
地址
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