| 发明名称 |
Apparatus for producing a single crystal |
| 摘要 |
Apparatus for producing a single crystal of semiconductor material in accordance with the Czochralski method, has a cooling means which cools the growing single crystal and is constructed in two parts, The first is an upper part duct system through which a liquid coolant flows. The second is a lower part which is a heat-conducting cooling body.
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| 申请公布号 |
US5567399(A) |
申请公布日期 |
1996.10.22 |
| 申请号 |
US19960592072 |
申请日期 |
1996.01.26 |
| 申请人 |
WACKER SILTRONIC GESELLSCHAFT F+E,UML U+EE R HALBLEITERMATERIALIEN AG |
发明人 |
VON AMMON, WILFRIED;DORNBERGER, ERICH;WEIDNER, HERBER;PARDUBITZKI, ALFRED |
| 分类号 |
C30B15/00;C30B15/14;H01L21/208;(IPC1-7):B01D9/00 |
主分类号 |
C30B15/00 |
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