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发明名称
摘要
申请公布号
JPS54115864(U)
申请公布日期
1979.08.14
申请号
JP19780011124U
申请日期
1978.01.31
申请人
发明人
分类号
G01N27/12;G01N27/00;H01L21/60;H01L23/48;H01L23/50;(IPC1-7):G01N27/00;H01L29/44
主分类号
G01N27/12
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代理人
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地址
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