SHIELD COVER OPERATION METHOD FOR SEMICONDUCTOR DIFFUSION FURNACE,申请号JP19770154226-传众专利搜索

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发明名称	SHIELD COVER OPERATION METHOD FOR SEMICONDUCTOR DIFFUSION FURNACE
摘要
申请公布号	JPS5485668(A)	申请公布日期	1979.07.07
申请号	JP19770154226	申请日期	1977.12.20
申请人	FUJI ELECTRIC CO LTD	发明人	SATOU NORITADA
分类号	C23C16/44;C30B31/06;H01L21/22	主分类号	C23C16/44
代理机构		代理人
主权项
地址

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