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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS5483784(A)
申请公布日期
1979.07.04
申请号
JP19770151967
申请日期
1977.12.16
申请人
NIPPON ELECTRIC CO
发明人
UNO TAKASHI
分类号
H01L21/86;H01L21/84
主分类号
H01L21/86
代理机构
代理人
主权项
地址
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