Integrated circuit mask patterns are laser machined by mounting substrates on a support that is periodically stepped in a y direction after each scan by a laser writing beam in an x direction. X-direction scanning is accomplished by mounting a mirror on a carriage that reciprocates by rebounding between two displaced coil springs. A coding laser beam is reflected from the carriage through a stationary code plate, comprising alternate transparent and opaque stripes, to monitor the position of the carriage and to control the modulation of the writing beam.
申请公布号
DE2535561(B2)
申请公布日期
1979.06.28
申请号
DE19752535561
申请日期
1975.08.08
申请人
WESTERN ELECTRIC CO., INC., NEW YORK, N.Y. (V.ST.A.)
发明人
FIRTION, VICTOR ANDREW, SECAUCUS;RONGVED, LEIF, SUMMIT;SAUNDERS, THOMAS EDWARD, BASKING
