| 摘要 |
<p>PURPOSE:To raise the oxidation resistance, the stability of resistance value, and resistivity by forming LaB6 theremogenous resistor by electronic beam deposition or sputtering and then by covering it with a protective layer with a conductor. CONSTITUTION:The surface of the base plate 1of ceramic glass, grazed ceramics, etc., is covered with the LaB6 thermogenous resistor 2, the electric conductor 3 of Al, Au, etc., for power supply, and the protective layer 4 of SiO2, Ta2O5, Al2O3, MgO, etc., or a multilayer of these, for protecting the resistor 2 and the conductor 3. The formation of LaB6 film is made by electronic beam deposition or sputtering. The heating of the base plate being processed for forming the film at 200 to 500 deg.C makes the adhesiveness of the film better, and also the heating of the base plate covered with the film at 200 to 650 deg.C brings on the regulated and stabilized resistance value. The sputtering is made in Ar gas of a 10<-3> to 5X10<-1> Torr when the target used is LaB6 or La and B, but in a mixed gas of Ar and diborane when the target is La alone.</p> |
