发明名称 STABILIZATION OF OPTICAL AXIS OF NARROW BAND OSCILLATION EXCIMER LASER
摘要 PURPOSE:To easily regulate a rear mirror and reproduce the optical axis of an output laser light by independently securing a front mirror from a device body, and so regulating the angle of the rear mirror that the front and rear mirrors are perpendicular to the laser light. CONSTITUTION:A laser light is output from a front mirror 7, reflected by mirrors 9, 10 disposed in a contraction projecting exposure device 8 to be guided to an exposure position. Here, since the distance from the mirror 7 to the exposure position is affected up to the several meters, even if the optical axis of the laser light is slightly fluctuated at the mirror 7, the exposure position is largely deviated. However, since the mirror 7 is fixed, if front and rear mirrors 5, 7 are perpendicular to the laser optical axis, the optical axis of the laser light output from the mirror 7 is always held constantly. Accordingly, with the fixed mirror 7 as a reference, the mirrors 5, 7 are set perpendicularly to the laser optical axis by regulating the angle of the mirror 5. Then, the optical axis of the laser light output from the mirror 7 can be easily reproduced.
申请公布号 JPH0294584(A) 申请公布日期 1990.04.05
申请号 JP19880246277 申请日期 1988.09.30
申请人 KOMATSU LTD 发明人 WAKABAYASHI OSAMU;KOWAKA MASAHIKO
分类号 H01L21/30;H01L21/027;H01S3/086;H01S3/136;H01S3/139 主分类号 H01L21/30
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