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发明名称
BONDING MACHINE
摘要
申请公布号
JPS5448163(A)
申请公布日期
1979.04.16
申请号
JP19770114454
申请日期
1977.09.22
申请人
SUWA SEIKOSHA KK
发明人
YABUSHITA TETSUO
分类号
H01L21/02;H01L21/60;H01L21/68
主分类号
H01L21/02
代理机构
代理人
主权项
地址
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