发明名称 LASER PROCESSING DEVICE
摘要 PURPOSE:To process a work at a high rate without using a multiface rotary mirror by facially scanning the surface of the work with laser while linearly moving an optical system in the direction of normal with respect to the direction of rotation of a disc.
申请公布号 JPS5432899(A) 申请公布日期 1979.03.10
申请号 JP19770098660 申请日期 1977.08.19
申请人 发明人
分类号 B23K26/08;B23K26/00;H01L21/301;H01L21/302 主分类号 B23K26/08
代理机构 代理人
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