Ion emission microscope microanalyser with analysis site variation - using synchronisation of position and analysis to avoid cratering

摘要

An ion emission microscope microanalyser has an ion source (2) in a vacuum chamber with a focussing system enabling bombardment of the surface of the test object. An immersion objective, aperture stop, a stop for separation of an image element, a mass filter and an ion detector are arranged in the secondary ion beam path. an external recording device is connected to the detector output. An additional device enables synchronous variation of the analysis surface point during local analysis in order to avoid cratering problems. An ion-optical converter placed behind the aperture stop has an opening along the beam axis performing the image separation stop function. Its dia. is the product of the microscope resolution and the linear magnification.