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经营范围
发明名称
THIN FILM FORMING DEVICE
摘要
申请公布号
JPS5420976(A)
申请公布日期
1979.02.16
申请号
JP19770086518
申请日期
1977.07.18
申请人
NIPPON ELECTRIC CO
发明人
FURUSE TAKAO
分类号
C23C14/46;C23C14/34
主分类号
C23C14/46
代理机构
代理人
主权项
地址
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