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发明名称
摘要
申请公布号
JPS542539(B2)
申请公布日期
1979.02.08
申请号
JP19770007932
申请日期
1977.01.28
申请人
发明人
分类号
H01L21/308;H01L21/306
主分类号
H01L21/308
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代理人
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