HEAT TREATMENT APPARATUS,申请号JP19770075821-传众专利搜索

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法人/股东/高管

发明名称	HEAT TREATMENT APPARATUS
摘要
申请公布号	JPS5410666(A)	申请公布日期	1979.01.26
申请号	JP19770075821	申请日期	1977.06.24
申请人	MITSUBISHI ELECTRIC CORP	发明人	TORII YUTAKA;OOKURA ISAO
分类号	H01L21/22	主分类号	H01L21/22
代理机构		代理人
主权项
地址

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