PURPOSE:To obtain an X-ray exposure device by coupling the X-ray absorber window and the mask matching mechanism via a flexible and airtight hood and then decompressing inside the hood or filling up the hood with the gas substance featuring a smaller X-ray absorption coefficient than the air.
申请公布号
JPS549584(A)
申请公布日期
1979.01.24
申请号
JP19770075309
申请日期
1977.06.23
申请人
NIPPON ELECTRIC CO;NIPPON TELEGRAPH & TELEPHONE;NICHIDEN VARIAN KK