发明名称 XXRAY EXPOSURE DEVICE
摘要 PURPOSE:To obtain an X-ray exposure device by coupling the X-ray absorber window and the mask matching mechanism via a flexible and airtight hood and then decompressing inside the hood or filling up the hood with the gas substance featuring a smaller X-ray absorption coefficient than the air.
申请公布号 JPS549584(A) 申请公布日期 1979.01.24
申请号 JP19770075309 申请日期 1977.06.23
申请人 NIPPON ELECTRIC CO;NIPPON TELEGRAPH & TELEPHONE;NICHIDEN VARIAN KK 发明人 MIZUSAWA KOUJI;HAYASAKA TOUA;SAITOU YASUNAO;NAKAYAMA SATORU;IGARASHI SHIYOUSUKE;MITO HIDEO;SUGIBUCHI KIYOSHI
分类号 H01L21/027;G03F7/20 主分类号 H01L21/027
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