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发明名称
MANUFACTURE OF MICROMACHINE
摘要
申请公布号
JPH06343272(A)
申请公布日期
1994.12.13
申请号
JP19930127519
申请日期
1993.05.28
申请人
SONY CORP
发明人
SATO JUNICHI
分类号
H02N1/00;B81C1/00;(IPC1-7):H02N1/00
主分类号
H02N1/00
代理机构
代理人
主权项
地址
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