PRODUCTION OF SEMICONDUCTOR DEVICE,申请号JP19770062351-传众专利搜索

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发明名称	PRODUCTION OF SEMICONDUCTOR DEVICE
摘要
申请公布号	JPS53147461(A)	申请公布日期	1978.12.22
申请号	JP19770062351	申请日期	1977.05.27
申请人	MITSUBISHI ELECTRIC CORP	发明人	AKASAKA YOUICHI
分类号	H01L21/22;H01L21/265	主分类号	H01L21/22
代理机构		代理人
主权项
地址

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