EXHAUST SYSTEM EQUIPPED WITH MASS SEPARATION MECHANISM

摘要

PROBLEM TO BE SOLVED: To prevent generation of gas molecules and sputter particles generated by impact of other gas ions except sputtered metal ions on the inner wall of a wave guide in an ion accelerator equipped with a sputter type ion source and a mass separation mechanism to reduce the mixing of impurities on the downstream side. SOLUTION: For the ion accelerator equipped with a sputter type ion source and a mass separation mechanism and adapted to implant metal ions in a target to be irradiated, a layer of active metals such as Ti+Ta is provided on the inner wall of a wave guide of the mass separation mechanism.