MICRO STRUCTURAL BODY, MICROMECHANICAL SENSOR, MICROACTUATOR, MICROOPTICAL POLARISCOPE, OPTICAL SCANNING DISPLAY AND MANUFACRURING METHOD THEREOF

摘要

PROBLEM TO BE SOLVED: To provide a micro structural body with high elasticity in vertical direction for twist axis while maintaining sufficient compliance in twist direction. SOLUTION: The micro structural body has a substrate 120 and at least an oscillating element 130. The oscillating element 130 is elastically and oscillation freely supported by at least a pair of torsion springs 128 and 129 comprising a plurality of torsion bars 122-125 for the substrate 120. The pair of torsion springs 128 and 129 includes at least two torsion bars 122-125 which are so placed that the long axis are parallel and close to each other, and the bars have the cross sectional shape of the face vertical to the long axis being flat and so placed that the direction most easily twist may cross.