ION ETCHING DEVICE,申请号JP19770021255-传众专利搜索

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发明名称	ION ETCHING DEVICE
摘要
申请公布号	JPS53106576(A)	申请公布日期	1978.09.16
申请号	JP19770021255	申请日期	1977.02.28
申请人	NIPPON ELECTRIC CO	发明人	GOKAN HIROSHI;EDOKORO SOUTAROU;KATOU YOSHIMASA
分类号	H01L21/302;C23F4/00	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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