发明名称 FILM THICKNESS MONITOR*FILM THICKNESS SETTER IN FILM THICKNESS MONITOR
摘要 PURPOSE:To realize a low cost as well as to facilitate the operation, by constituting the device with the monitor part which amplifies and monitors the interference waveform, the film thickness setting part, the setter part which determines the passing frequency through the setting level and others.
申请公布号 JPS53101264(A) 申请公布日期 1978.09.04
申请号 JP19770014980 申请日期 1977.02.16
申请人 HITACHI LTD 发明人 AKIBA MASAKUNI
分类号 C23C16/52;G01B11/06;H01L21/205;H01L21/31;H01L21/66;H01L31/04 主分类号 C23C16/52
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