Method of and apparatus for examining the roughness of surfaces

摘要

The invention provides a method of examining roughness of a surface of a workpiece, comprising: scanning said surface by means of a resiliently mounted support element during linear relative movement between a sensing element and said surface whereby self-oscillations are generated at the sensing element or at parts in connection therewith by unevennesses of said surface; receiving said self-oscillations; and determining a value which corresponds at least approximately to the magnitude of the amplitudes of the oscillations, said value being a criterion of roughness of said surface. The invention also provides apparatus for examining roughness of a surface of a workpiece, comprising: a holder; a sensing element; a support for the sensing element; the sensing element being movably supported against a yielding resistance by the holder; and a receiver system for oscillations and adapted to deliver electrical signals at its output, the sensing element or the support therefor being connected with the receiver.