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发明名称
URZADZENIE KASETOWE DO WIELOPLYTOWEJ EPITAKSJI Z FAZY CIEKLEJ
摘要
申请公布号
PL195228(A1)
申请公布日期
1978.07.17
申请号
PL19770195228
申请日期
1977.01.10
申请人
INST TECH ELEKTRONOWEJ
发明人
PASTUSZKA BOGDAN
分类号
H01L;H01L21/368;(IPC1-7):H01L/
主分类号
H01L
代理机构
代理人
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