FOTOELEKTRONISCHER BILDPROJEKTOR

摘要

The photoelectric image projector is used for imaging a mask onto a respective surface in the semiconductor production. The semiconductor surface is located at a distance from a photocathode covered by the mask (4). The projector uses a magnetic field at right angles to the photocathode and the semiconductor surface (5), as well as a parallel electric acceleration field. At the edge of the space through which propagate electron between the mask and the semiconductor surface is provided one or several conductive plates (6) parallel to the same. The plates are connected to a voltage divider (7), supplied with the acceleration voltage. Preferably the magnetic field is generated by a permanent magnet.