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发明名称
VERFAHREN ZUM HERSTELLEN VON PRAEZISIONSTEILEN DURCH AETZEN
摘要
申请公布号
DE2752378(A1)
申请公布日期
1978.06.29
申请号
DE19772752378
申请日期
1977.11.24
申请人
INTERNATIONAL BUSINESS MACHINES CORP.
发明人
EDWARD OLSEN,CARLTON;JASPER SERPA,LEROY
分类号
B41J2/085;B41J2/09;G03C5/00;G03C5/56;G03F7/004;G03F7/20;(IPC1-7):C23F1/02;B41J3/04;B44C1/22;H01L21/302;H05K3/06
主分类号
B41J2/085
代理机构
代理人
主权项
地址
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