| 发明名称 |
DIRECTIONAL CUTTING METHOD OF SINGLE CRYSTAL |
| 摘要 |
<p>PURPOSE:To perform directional cutting of single crystal easily and economically, by utilizing laser light for the measurement of relative angle between edge surface and refferential surface of single crystal.</p> |
| 申请公布号 |
JPS5364799(A) |
申请公布日期 |
1978.06.09 |
| 申请号 |
JP19760139517 |
申请日期 |
1976.11.22 |
| 申请人 |
TOKYO SHIBAURA ELECTRIC CO |
发明人 |
MATSUMURA SADAO |
| 分类号 |
H01L41/18;B26D1/00;C30B29/30;H01B3/02;H01L21/302;H01L41/22 |
主分类号 |
H01L41/18 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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