MANUFACTURE OF SEMICONDUCTOR DEVICE,申请号JP19870231309-传众专利搜索

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发明名称	MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号	JPS6473769(A)	申请公布日期	1989.03.20
申请号	JP19870231309	申请日期	1987.09.16
申请人	MATSUSHITA ELECTRIC IND CO LTD	发明人	ICHIKAWA YOHEI;YABU TOSHIKI;FUKUMOTO MASANORI
分类号	H01L21/265;H01L21/336;H01L29/78	主分类号	H01L21/265
代理机构		代理人
主权项
地址

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