ELECTRON BEAM EXPOSURE METHOD,申请号JP19760114221-传众专利搜索

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发明名称	ELECTRON BEAM EXPOSURE METHOD
摘要
申请公布号	JPS5339078(A)	申请公布日期	1978.04.10
申请号	JP19760114221	申请日期	1976.09.22
申请人	MITSUBISHI ELECTRIC CORP	发明人	KATOU TADAO
分类号	H01L21/027;H01L21/302	主分类号	H01L21/027
代理机构		代理人
主权项
地址

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