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发明名称
SEMICONDUCTOR UNIT
摘要
申请公布号
JPS5335477(A)
申请公布日期
1978.04.01
申请号
JP19760110077
申请日期
1976.09.14
申请人
TOKYO SHIBAURA ELECTRIC CO
发明人
IWASAKI HIROSHI;OZAWA OSAMU
分类号
H01L29/80;H01L21/331;H01L21/8222;H01L27/06;H01L29/08;H01L29/72;H01L29/73
主分类号
H01L29/80
代理机构
代理人
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地址
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