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发明名称
PRODUCTION OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS5335390(A)
申请公布日期
1978.04.01
申请号
JP19760108835
申请日期
1976.09.13
申请人
TOKYO SHIBAURA ELECTRIC CO
发明人
MURAKAMI KENJI
分类号
H01L29/78;H01L21/3205
主分类号
H01L29/78
代理机构
代理人
主权项
地址
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