VERFAHREN ZUR BILDUNG EINZELNER PHOTODETEKTORELEMENTE AUF EINEM SUBSTRAT SOWIE NACH DIESEM VERFAHREN HERGESTELLTE PHOTODETEKTORANORDNUNG

摘要

A novel mask is used to contour the photodetector body and adhesive layer of a photodetector device on a substrate in which the mask apertures define an angle with the plane of the substrate. Air abrasion at that angle removes unwanted portions of the photodetector body and adhesive layer, leaving a contour desirable for subsequent interconnect metallization.