,申请号JP19730113636-传众专利搜索

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发明名称
摘要
申请公布号	JPS533974(B2)	申请公布日期	1978.02.13
申请号	JP19730113636	申请日期	1973.10.09
申请人		发明人
分类号	C23F1/00;C09K13/04;C23F1/26;G03F1/00;G03F1/68;G03F1/80;H01L21/027;H01L21/30;H01L21/308;H05K3/06	主分类号	C23F1/00
代理机构		代理人
主权项
地址

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