| 摘要 |
PURPOSE:To obtain an atomicforce microscope (AFM) unit which can be incorporated into an optical microscope which is available on the market by installing a coupling part which is coupled to the optical microscope so as to be freely detachable. CONSTITUTION:A base 2 is provided with a coupling part 16 which is used to attach an AFM unit to an optical microscope in a position directly under a sample holder 4 on its bottom face. The coupling part 16 has a structure corresponding to the stage mounting part of a substage. When the optical microscope is to be used as an ordinary optical microscope, a unit frame 5 is lowered, and a cantilever holder 7 is detached. In this state, a sample S which is held by the sample holder 4 is observed by an objective lens 101. After that, when the sample is to be observed by the AFM unit, the unit frame 5 is raised, and the catilever holder 7 is mounted in the central hole of the unit frame 5. In addition, an incidence-side reflecting mirror 11 is moved directly above a cantilever 6. By this operation only, the sample can be observed by the AFM unit.
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